ICPT 2018

Abstract submission
본문 헤드밑 언더라인

The program committee welcomes the submission of abstracts for ICPT 2018. Prospective authors are asked to submit an extended abstract with a minimum of 250 words, written in English, and may include figures.

Abstracts of original work are requested on the following topics:

FEOL CMP

BEOL CMP

Defects, reliability issues and Post CMP cleaning

CMP fundamentals, modeling and simulation

Equipment and metrology

Process control

Emerging technologies in CMP

CMP consumables

3D Ics/TSV applications

Alternative CMP technologies

CMP for MEMS




Submission Guidelines

Abstracts will be scored according to the originality and significance of the work as well as the quality of the information and data included. Please indicate the preference of oral or poster presentation, and the targeted topic area when submitting the abstract. Submit abstracts online, using the template provided. The deadline for submitting abstracts is April 27, 2018. Presentation of accepted papers at the Conference must be in English.

Author Notification

Notice:

1. Please be sure to use the templateprovided here.
2. The abstract should be submitted online.click here

Full Paper Submission

Camera-ready full-length papers, including figures and references (within 6 pages) should be submitted online upon the notice of accepted abstracts. Camera-ready papers are due on August 31, 2018.

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