2016 International Conference on Planarization/CMP Technology (ICPT 2016)

October 17-October 19, 2016

Beijing Friendship Hotel, China

Website : http://www.icpt2016.com

ICPT 2016 is hosted by CMP User's Group-China (CMPUG-CN). This conference will enhance the collaboration between industry and academia, manufacturers and clients, in response to the trend of rapid development of semiconductor industry. ICPT 2016 encourages the communication and exchange of ideas and opportunities. We look forward to seeing you at ICPT 2016 and show you around the beautiful Friendship Hotel in Beijing city, China.

Abstract Submission Deadline: April 30, 2016

Abstracts of original work are requested on the following topics:

Front end and Back end CMP                                         Equipment and metrology 

Process integration and control                                       Emerging technologies in CMP

Defects and Post CMP cleaning                                       CMP consumables 

Reliability issues                                                          3D Ics/TSV applications

CMP fundamentals, modeling and simulation                       CMP alternative technologies

CMP for MEMS                                                           CMP for Green devices

Submission Guidelines

Abstracts should be a minimum of 200 words, written in English, and may include figures. Abstracts will be scored according to the originality and significance of the work as well as the quality of the information and data included. Please indicate the preference of oral or poster presentation, and the targeted topic area when submitting the abstract. Submit abstracts online, using the template provided. The deadline for submitting abstracts is April 30, 2016. Presentation of accepted papers at the Conference must be in English.

Camera-ready full-length papers, including figures and references (4-8 pages for oral presenters and 3-4 pages for poster presenters) should be sent electronically toraocan@icmtia.com upon the notice of accepted abstract. Camera-ready papers are due on August 15, 2016. The full text of conference oral and poster papers will be published as an IEEE proceedings volume.

Author Notification

All submitted abstracts will be reviewed by peers and the Technical Committee reserves the right to accept or reject papers for inclusion in the program. Notices of acceptance of abstract will be sent out to authors by June 1, 2016.